Design and technology of copper comb capacitors

The article presents the construction and technology of comb capacitors on a polycarbonate substrates. The structures have been designed to be used in the ECIS® measurement system that allows monitoring the activity of the examined cells by analyzing the changing electrical parameters impedance, resistance and capacitance in real time. The copper layer was embedded by sputtering method. The resulting comb capacitors were used in a test sample of substances with different chemical properties.