DLC layer - production and properties

Piotr Firek, Ryszard Gronau, Jan Szmidt

Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland

This work presents deposition and properties of diamond-like carbon (DLC) thin films. Also studies on their applications in such electronic devices as field electron emitters and detectors of hydrogen and its compounds are presented. The DLC films were deposited by radio-frequency plasma-enhanced chemical vapour deposion (RF PECVD) method on silicon substrates.
In case of the electron emitters the DLC films were applied as emitting layer or as an interfacial layer for carbon nanotube-based devices. We studied here an influence of the deposition parameters on functional properties of the devices In case the hydrogen and its compounds detectors, we studied an influence of a presence of DLC interfacial layer on adhesion of nanocomposite carbonaceous film containing palladium nanograins. An influence of an annealing process on morphology of the films was investigated

Author: dr P.Firek
Conference: Title