Synthesis and Properties of the C-Pd Layers

Synthesis and Properties of C-Pd Layers
Elżbieta Czerwosz, Ewa Kowalska*, Anna Kamińska, Sławomir Krawczyk, Mirosław Kozłowski, Joanna Rymarczyk, Halina Wronka, Joanna Radomska

Tele & Radio Research Institute, Ratuszowa 11, 03-450 Warsaw, Poland

*Corresponding autor: ewa.kowalska (at) itr.org.pl

In this paper, the synthesis method of C-Pd layers using two stages process PVD and PVD/CVD are presented. As the first stage PVD method is applied using two sources: fullerite C60 and palladium acetate Pd(OAc)2, these compounds are precursors of our C-Pd layers. As a result we obtain nanocomposite layers consisted of carbon and palladium nanograins. In the second stage CVD process with xylene is used to modify initial PVD layers. The purpose of this modification is to increase the specific surface area of initial layers by converting the carbon grains in the porous structure of the foam type and the migration of Pd nanograins to the surface in order to intensify the interaction hydrogen with layers.
We show the influence of current flowing through the metal source on palladium concentration in PVD layers for various distances of the sources - substrates and also the influence of PVD process duration on Pd concentration in layers.
We also discuss how substrate type has an impact on the structure and topography of the C-Pd layers.

http://wilga.ise.pw.edu.pl/sites/wilga.ise.pw.edu.pl/files/Abstrakt -Kowalska.pdf