Thin film capacitors made of various metals for impedance sensing technique

POSTER

The article is devoted to measuring matrices that can be used to determine the impact of a given material on a biological substance in BioMEMS devices. The focus is on the use of the ECIS system. The test consists in measuring the impedance of cells through which a low-current current is passed. As part of the conducted research, based on the commercial matrixes of the ECIS system, special test plates were designed and made on a biocompatible polycarbonate substrate. Titanium, chromonielelin, nickel and copper were used. The first measurements characterizing the structures made were carried out.