Design and technology of titanium comb capacitor

This paper presents issues related to the creation of research plates with titanium electrodes, which are a new alternative to currently used plates with gold electrodes. Methods for obtaining metallization of titanium, necessary for the production of electrodes are described. Various lithography techniques are presented for processing the obtained layer of the material. The stages of designing and manufacturing comb capacitors and ready-made research plates have been presented. Finally, substrates with a titanium layer have been designed and manufactured to allow the impedance of living cells to be measured.