Growth and transfer of boron doped diamond foil.

Mateusz Ficek*1, Maciej Marchwiński1 and Robert Bogdanowicz*1

1Faculty of Electronics, Telecommunications and Informatics, Gdańsk University of Technology, 11/12 Narutowicza str., 80-233 Gdansk, Poland

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We report growth of boron doped diamond foils on tantalum substrates by microwave plasma assisted chemical vapor deposition. The diamond foils were synthesized on mirror polished tantalum substrates at 500 ºC using H2:CH4:B2H6 gas mixture in plasma. The growth time of 2h producing film of a thickness ca. 500 nm. In order to transfer foils to another substrate, we have polished edges of a diamond on tantalum sample. Then, the sample was slowly immersed into petri dish filled with deionized water. We have delaminated mechanically diamond foil from origin substrate and transferred it on the non-conductive glass slide or thick silicon oxide wafer. The chemical composition on both sides of transferred foil samples was investigated with micro-Raman Spectroscopy . The both Raman spectra present a strong “D” and “G” bands and typical boron doping band. The film surface nano-morphology was investigated by means of scanning electron microscopy. It reveals a uniform and conformal coverage of substrate without cracks. The samples were also characterized by optical microscopy to investigate the micro-morphology of the nanocrystalline films. Furthermore, the film thickness and optical properties i.e. refractive index of foils were estimated by utilizing spectroscopic ellipsometry (SE) technique.
In summary, the fabrication procedure and parameters of novel freestanding diamond foils has been studied. The thin diamond foils could be the attractive candidate to facilitate various electronic and biosensing devices (e.g. FETs).

The authors gratefully acknowledge financial support from the Polish National Science Centre (NCN) under Grant No. 2015/17/D/ST5/02571. The DS funds of the Faculty of Electronics, Telecommunications and Informatics of the Gdansk University of Technology.

Author: Maciej Marchwinski
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