Optical profilometer

Aleksandra Wieloszyńska, Marcin R. Strąkowski

Gdańsk University of Technology, Faculty of Electronics, Telecommunications and Informatics, Department of Metrology and Optoelectronics, Gabriela Narutowicza Street 11/12, 80-233 Gdańsk, Poland

The profilometry plays a huge role in the most fields of science and technology. It allows to measure the profile of the surface and with high-resolution. This technique is used in the fields like optic, electronic, medicine, automotive, and much more. The aim of the current work was to design and build optical profilometer based on the interference phenomena. The developed device has been working with He-Ne laser (632.8 nm). The optical parts have been chosen in order to reach the sized 2.0 mm x 1.6 mm of scanning area. The setup of the profilometer is based on Twyman-Green interferometer. Therefore, the phase distribution of the backreflected light from measured surface is recorded. The measurements are carried out with the aid of multiframe algorithms. In this approach we have used the Hariharan algorithm to obtain the exact change of the recorded phase. During tests, which have been developed for checking the functionality of the device, the interference patterns have been recoded and processed in order to obtain the 3D profile of measured surface. In this contribution the setup of the optical system, as well as signal processing methods are going to be presented. The brief discussion about the advantages and disadvantages, and usefulness of this approach will be carried out.

Author: Aleksandra Wieloszyńska
Conference: Title